TMAH solution is widely used in the electronics industry as a developer or cleaner. TMAH is typically one of several ingredients in etching / stripping mixtures, although it may also be used as a pure chemical. It is often used in solution in water, and less frequently, in methanol.

KOH and TMAH are anisotropic silicon etches, used to make V-grooves, membranes, and holes through wafers, as well as other devices. ... KOH is simply the hydroxide of potassium. TMAH is a organic hydroxide and stands for Tetramethyl ammonium hydroxide.

Ammonia has alkaline properties and is corrosive. Ammonia gas dissolves easily in water to form ammonium hydroxide, a caustic solution and weak base. Ammonia gas is easily compressed and forms a clear liquid under pressure. Ammonia is usually shipped as a compressed liquid in steel containers.

TETRAMETHYL AMMONIUM HYDROXIDE PENTAHYDRATE FOR SYNTHESIS